Research Activities

General area of interest: semiconductor process technology and device physics

Research history:

 1974-1979  Optical processes in MOS capacitors (Ph.D. thesis)
 1980-1982  Polysilicon fuses and antifuses
 1982-1988  Polysilicon junctions and polysilicon emitter transistors
 1982-1988  Thin film transistors for active-matrix flat-panel displays
1988-1990  Thin films of high temperature superconductors
 1995-1997  Surface processes during growth of boron nitride
 1995-1998  Semiconductor process control
 1995-2001  Wide-gap semiconductors
 1989-2001  Germanium-silicon-carbon alloys: growth and applications
 1998-2001  MEMS-based data storage
 1999-2001  Quantum dots and application to quantum cellular automata (QCA)
 2000-present   Biological sensing
 2000-present   Infrastructure sensing