Electrical & Computer Engineering     |     Carnegie Mellon

Tuesday, November 21, 12:00-1:00 p.m. HH-1112


Jason Clark
Purdue University

Electro Micro Metrology

In this seminar, I will present a novel methodology called electro micro-metrology (EMM) that can be used to quickly and accurately extract over two-dozen fundamental geometrical, dynamic, and material properties at the micro and nanoscale.

Why it matters: The rate of technological advancements at the micro and nanoscale depends on characterizing the related physical phenomena. To verify analytical and numerical models of such phenomena, it is necessary that the performance of the models match the performance of the true devices. A key prerequisite to matching the performance of the true device is that the model must share the same geometric and material parameters. These parameters must be measured for each test device because parameters vary per fabrication run and parameters vary across the wafer itself.  However, conventional methods typically yield low relative errors, often 1 to 3 significant digits. New and interesting phenomena are often subtle. The low precisions of conventional measurement techniques have not been able to resolve many of these subtleties. Consequently, theoretical models rely on unconfirmed geometric and material properties, and testing standards at this scale remain relatively nonexistent.

Benefits of EMM: In contrast to conventional metrology techniques, EMM exploits the coupling between the mechanics and electronics at the microscale. Subtle mechanical changes can be electronically sense; that is, geometric and mechanical properties can be functions of electrical measurands. Unique attributes follow. For instance, such uncertainties are controllable and well defined. And since EMM is completely M/NEMS-based, it may be packaged along side a primary device to provide instantaneous measurements as conditions change.


Jason Clark is an Assistant Professor of Electrical and Computer Engineering, and of Mechanical Engineering, at Purdue University. He is a faculty member of the Birck Nanotechnology Center, and of the Network for Computational Nanotechnology. Dr. Clark received his Ph.D. in Applied Science from the University of California at Berkeley in 2005. His CAD/E efforts lead to one of the first nodal analysis software packages for MEMS, called SUGAR (i.e. SPICE for MEMS). And his micro-metrology efforts lead to the first comprehensive on-chip methods for measuring micro-scale geometry and material properties, called electro micro-metrology (EMM). Prior to joining Purdue University, he held positions at Lawrence Livermore National Lab, Berkeley National Lab, Berkeley Biomedical Microdevices Center, Berkeley Sensor and Actuator Center, and Coventor.