Electrical & Computer Engineering     |     Carnegie Mellon

Thursday, March 3, 12:00-1:00 p.m. HH-1112


Fang Chen
Carnegie Mellon University

CMOS-MEMS Resonant RF Mixer-Filters

An integrated CMOS-MEMS micromechanical resonant mixer-filter with potential for application in a single-chip receiver is introduced. Air and anchor damping characterization show quality factor greater than 1500. Downconversion and filtering of signal frequencies as high as 3.2 GHz is achieved. This is the highest signal frequency applied so far to MEMS mixer-filters. Analytical calculations match well with the experimental measurements and are used to show that 0 dB mixer conversion loss is achievable. Co-simulation of the MEMS mixer with readout electronics identifies potential solutions to eliminate mixing feedthrough.


Dr. Fang Chen is a post-doctoral researcher in the MEMS Laboratory of Electrical and Computer Engineering at Carnegie Mellon University. He received a B.S. in Applied Physics from Polytechnic University of Beijing, a M.S. in Physics from University of Minnesota, and both M.S. and Ph.D. degrees in Electrical and Computer Engineering from Carnegie Mellon University. His current research focuses are CMOS-MEMS post-process design rules, and micromechanical resonators in radio frequency applications. He also has long time experiences in magnetic and optical data storage.