Nonlinear MEMS Oscillators

Spring 2009

Student
Kahini Shah
Advisor
Gary Fedder
Project description

The goal is to investigate the operation and theory behind nonlinear microelectromechanical (MEM) oscillators. These are parametric resonators that oscillate between unstable and stable states making them useful for high sensitivity gravimetric and vibration sensing. The operation of the device is governed by the Mathieu Equation. The research process includes study of theory, SIMULINK simulations of the proposed device, and design and testing of the oscillator fabricated in the CMOS-MEMS process. These findings will be integrated into a paper to document the results.

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