January 9, 2002
The ECE Department and The Robotics Institute will sponsor an Introduction to Microelectromechanical Systems (MEMS) Short Course from January 9-10, featuring classroom lectures and hands-on demonstrations in Carnegie Mellon University's MEMS lab facilities. Attendees will view fabrication steps such as pattern transfer techniques using photolithography and various deposition and etching technologies. In the characterization facilities, they will be exposed to various MEMS devices such as electrostatic and thermal actuators, while discussing design issues and constraints, applications of microsensors and microactuators, and current fabrication access for academia, industry, and government.
The course is designed for scientists, engineers, or technologists who need information and hands-on experience with silicon-based integrated microsystems; managers, designers, and salespersons who are evaluating the use of MEMS technology; and individuals in industry, government or research laboratories with technical backgrounds in engineering or physics.
Kaigham (Ken) J. Gabriel, Professor of Electrical and Computer Engineering and Robotics will instruct. The deadline for registration is December 17 and the cost is $1900, made payable to Carnegie Mellon University.
MEMS technology has applications for inertial navigation, data storage, biochemical analysis, micromanipulation, optical displays, and microfluidic systems. Growth in this area is spurred by the promise of better performance, lower cost, and minaturized sensor and actuator systems.