Assistant Professor – MechE, ECE
| Contact Information | |
|---|---|
| Department | Mechanical Engineering |
| Telephone | (412)-268-2509 |
| masheghi@andrew.cmu.edu | |
Design of microfabricated transistors, sensors, and actuators for integrated circuits, MicroFluidic systems and MicroElectroMechanical Systems (MEMS) demands a thorough understanding of the heat and/or fluid transport in small length and/or time scales.
Thermal transport property measurements of circuit related and other novel materials are an important and relevant area of research for semiconductor industry. Estimation of the temperature field in microelectronic devices, determination of the thermal efficiency in MicroThermoElectric Coolers (MTEC), and evaluation of the thermal performance of MicroElectroMechanical sensors and actuators all demand accurate knowledge of the temperature dependent thermal properties of their constituent materials.
Professor Asheghi has made contributions to the understanding of thermal transport in thin silicon layers by measuring the thermal conductivity of nearly pure and doped single crystalline silicon layers in the order of one micron thickness, and by refining a theory that accounts for the reduction in thermal conductivity of silicon layers due to size effect and additional impurities.
Recently, Prof. Asheghi has been involved in the design and development of compact thermal management systems for cooling of computer microprocessors.
Nanoscale heat transport in microelectronic devices and data storage systems
PhD, 1999
Stanford University
MS, 1994
CSULB
BS, 1991
SUT