Howard M. Wilkoff Professor – ECE, RI; Director – ICES; Co-Director – MEMS
Carnegie Mellon, 1994 –
| Contact Information | |
|---|---|
| Department | Electrical and Computer Engineering |
| Office | 1201 Hamburg Hall |
| Telephone | (412)-268-8443 |
| Fax | (412)-268-9687 |
| fedder@ece.cmu.edu | |
| Website | http://www.ece.cmu.edu/~fedder/ |
Professor Fedder's research interests are in the multidisciplinary area of microelectromechanical systems (MEMS), and focus primarily on design, fabrication, and control aspects of sensor- and actuator-based systems. In MEMS, micron- to millimeter-size systems with sophisticated abilities to interact with their environment are manufactured through the use of VLSI-based photolithographic batch fabrication methods. Current research activities include micro-sensor and microactuator design; microrobotic control and manipulation; embedded microinstruments; nanometer-scale, probe-based data storage; and structured design methodologies for MEMS. Professor Fedder's group is designing a variety of MEMS, including microaccelerometers, gyroscopes, resonant sensors, and x-y-z microservos, using a unique process that combines foundry CMOS with thin film microstructures. Research in MEMS computer-aided design aims to develop structured design tools and a top-down synthesis flow. Continuing research will study control of large systems of microsensors and actuators, and broaden the manufacturing capabilities of integrated MEMS.
Applied Physics/Devices
Microelectromechanical systems (MEMS), RF MEMS, inertial/bio/chemical sensors, MEMS CAD, micro-robotics
PhD, 1994
Electrical Engineering and Computer Science
University of California, Berkeley
MS, 1984
Electrical Engineering and Computer Science
MIT
BS, 1982
Electrical Engineering and Computer Science
MIT