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Gary Fedder

Howard M. Wilkoff Professor – ECE, RI; Director – ICES; Co-Director – MEMS
Carnegie Mellon, 1994 –

Contact Information
 
Department Electrical and Computer Engineering
Office 1201C Hamburg Hall
Telephone (412)-268-8443
Fax (412)-268-9687
Email fedder@ece.cmu.edu
Website http://www.ece.cmu.edu/~fedder/
Assistant J. Chraska

Research Interests

Professor Fedder's research interests are in the multidisciplinary area of microelectromechanical systems (MEMS), and focus primarily on design, fabrication, and control aspects of sensor- and actuator-based systems. In MEMS, micron- to millimeter-size systems with sophisticated abilities to interact with their environment are manufactured through the use of VLSI-based photolithographic batch fabrication methods. Current research activities include micro-sensor and microactuator design; microrobotic control and manipulation; embedded microinstruments; nanometer-scale, probe-based data storage; and structured design methodologies for MEMS. Professor Fedder's group is designing a variety of MEMS, including microaccelerometers, gyroscopes, resonant sensors, and x-y-z microservos, using a unique process that combines foundry CMOS with thin film microstructures. Research in MEMS computer-aided design aims to develop structured design tools and a top-down synthesis flow. Continuing research will study control of large systems of microsensors and actuators, and broaden the manufacturing capabilities of integrated MEMS.

In the News

Headshot of Gary Fedder

Research Area

Applied Physics/Devices

Keywords

Microelectromechanical systems (MEMS), RF MEMS, inertial/bio/chemical sensors, MEMS CAD, micro-robotics

Education

PhD, 1994
Electrical Engineering and Computer Science
University of California, Berkeley

MS, 1984
Electrical Engineering and Computer Science
MIT

BS, 1982
Electrical Engineering and Computer Science
MIT



5000 Forbes Avenue / Pittsburgh, PA 15213-3890 / Phone: 412-268-7400 / Fax: 412-268-2860