Electrical and Computer Engineering at Carnegie Mellon University

Gary Fedder

Howard M. Wilkoff Professor – ECE, RI ; Director – ICES ; Co-Director – MEMS ; Affiliated Faculty – DSSC

Department	Electrical and Computer Engineering
Office	1201C Hamburg Hall
Telephone	(412)-268-8443
Fax	(412)-268-9687
Email	fedder@ece.cmu.edu
Website	http://www.ece.cmu.edu/~fedder/
Assistant	Jacqueline Chraska

Research Interests

Professor Fedder's research interests are in the multidisciplinary area of microelectromechanical systems (MEMS), and focus primarily on design, fabrication, and control aspects of sensor- and actuator-based systems. In MEMS, micron- to millimeter-size systems with sophisticated abilities to interact with their environment are manufactured through the use of VLSI-based photolithographic batch fabrication methods. Current research activities include micro-sensor and microactuator design; microrobotic control and manipulation; embedded microinstruments; nanometer-scale, probe-based data storage; and structured design methodologies for MEMS. Professor Fedder's group is designing a variety of MEMS, including microaccelerometers, gyroscopes, resonant sensors, and x-y-z microservos, using a unique process that combines foundry CMOS with thin film microstructures. Research in MEMS computer-aided design aims to develop structured design tools and a top-down synthesis flow. Continuing research will study control of large systems of microsensors and actuators, and broaden the manufacturing capabilities of integrated MEMS.