Course Information

18-614: Microelectromechanical Systems

Units:

12

Description:

This course introduces fabrication and design fundamentals for Microelectromechanical Systems (MEMS): on-chip sensor and actuator systems having micron-scale dimensions. Basic principles covered include microstructure fabrication, mechanics of silicon and thin-film materials, electrostatic force, capacitive motion detection, fluidic damping, piezoelectricity, piezoresistivity, and thermal micromechanics. Applications covered include pressure sensors, micromirror displays, accelerometers, and gas microsensors. Grades are based on exams and homework assignments.

4 hrs. lec.

Prerequisites: 18-300 or 18-310 or 18-320 or 24-351

Last Modified: 2018-05-03 11:12AM

Semesters offered:

  • Fall 2018
  • Fall 2017
  • Fall 2016
  • Fall 2015
  • Fall 2014
  • Spring 2014
  • Fall 2013
  • Fall 2012
  • Fall 2011
  • Fall 2010
  • Fall 2009
  • Fall 2008
  • Spring 2008
  • Fall 2007
  • Fall 2006
  • Fall 2004