12 units
This course introduces fabrication and design fundamentals for Microelectromechanical Systems (MEMS): on-chip sensor and actuator systems having micron-scale dimensions. Basic principles covered include microstructure fabrication, mechanics of silicon and thin-film materials, electrostatic force, capacitive motion detection, fluidic damping, piezoelectricity, piezoresistivity, and thermal micromechanics. Applications covered include pressure sensors, micromirror displays, accelerometers, and gas microsensors. Grades are based on exams and homework assignments.
4 hrs. lec.
Prerequisites: 18-300 or 18-310 or 18-321 or 18-322 or 24-351
Prerequisite for: 18-724, 18-819A
Last updated on October 28, 2011
Applied Physics
Applied Physics (Solid State/Magnetics/Fields)
Depth
F12
F11, F10, F09, F08, S08, F07, F06, F04
Please note that the course history information is incomplete and/or may reflect different courses offered under the same course number.