| Design |
|
Person(s) |
Responsibility |
| Tamal Mukherjee |
MOSIS Chip Submission |
| |
| Characterization Lab HH1208/1210/1212 |
|
Person(s) |
Responsibility |
| Larry Schultz |
Facilities |
| ECE Gripe |
Computer Software/Hardware |
| Jingwei Liu |
Microvision System |
| Sarah Bedair |
Probe Station (Wentworth) |
| John Reinke |
White Light Interferometer (Wyko) |
| Chiung-Cheng Lo |
Wire Bonder (Westbond) |
| |
| RF MEMS Lab REH 324 |
|
Person(s) |
Responsibility |
| Abhishek Jajoo |
Cascade RF Probestation |
| Abhishek Jajoo |
Agilent E8364A PNA 50 GHz Network Analyzer |
| Abhishek Jajoo |
Agilent E4440 PSA 26.5 GHz Spectrum Analyzer |
| Abhishek Jajoo |
Agilent E8251 PSG-A 20 GHz Modulated Microwave Signal Generator |
| Abhishek Jajoo |
Agilent E8241 PSG-L 20 GHz Modulated Microwave Signal Generator |
| Chiung-Cheng Lo |
Portable Vacuum Chamber |
| |
| Chemistry Lab HH1216 |
|
Person(s) |
Responsibility |
| Larry Schultz |
Chem Room Admin including entrance rules/Honeywell system maintentance and Safety links |
| Lifu Zhou |
Ellipsometer |
| Smitha Shetty |
Microscope (Leica) |
| Need to update |
Profilometer (Dektak)
|
| Larry Schultz |
Rapid Thermal Annealer |
| Larry Schultz |
Spin Coater (Laurel) |
| Suresh Santhanam |
Sputtering System (Lesker) |
| Suresh Santhanam |
Sputtering/EvaporationSystem (Indel) |
| Feifei Cao |
UV Exposure System |
| Smitha Shetty |
Xetch Etching System (XACTIX) |
| Smitha Shetty |
Acid Wet Bench |
| Smitha Shetty |
Solvent Wet Bench |
| Larry Schultz |
NESLAB Chiller and 02 Plasma Asher |
| Peter Gilgunn |
Ovens |
| Smitha Shetty |
Waste Disposal |
| Peter Gilgunn |
Heidelberg DWL66 |
| |
| Clean Room |
|
Person(s) |
Responsibility |
Chiung-Chung Lo
Fernando Alfaro |
STS DRIE |
| |
| Software |
|
Person(s) |
Responsibility |
| Yi Wang |
CFDRC |
| Tamal Mukherjee |
MEMSCAP |
| Chiung-Cheng Lo |
ANSYS |
| Tamal Mukherjee |
Ansoft |
| Abhishek Jajoo |
Cadence |
| Tamal Mukherjee |
EESof |
| Byung Woo Yoon |
Mathematica |
| Need to update |
Saber |
| Amy Wung |
FEMLAB |
| Peter Gilgunn |
Matlab |
| Abhishek Jajoo |
Neocircuit |
| Abhishek Jajoo |
UltraSYN Full Wave Solver |
| |
| MEMS Course Lab HH 1202 |
|
Person(s) |
Responsibility |
| Sarah Bedair |
MEMS Course Equipment |
