
	Foundation for MEMS Synthesis

		This project is a joint effort involving Carnegie Mellon University, MIT, University of California at Berkeley, University of Pennsylvania, and Microcosm Technologies, Inc. Our goal is to shorten the development cycle for MEMS from years to days and enable design of much more complex MEMS than can be handled today. To this end, the research team is developing a hierarchical MEMS design methodology and associated evaluation and synthesis tools. Four example tools resulting from this project are: Microresonator Synthesis Module Nodal Simulation - NODASv1.4 Accelerometer Synthesis MUMPs Accelerometer Synthesis CMOS Accelerometer Synthesis We're also working on a couple of canonical design problems for the Composite CAD program. Details for the resonator problem are available. Technical contacts: Prof. Gary Fedder, Carnegie Mellon University Prof. Jacob White, MIT Prof. Kris Pister, U.C. Berkeley Prof. G. K. Ananthasuresh, University of Pennsylvania John Gilbert, Microcosm Technologies